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model：                                         EUV-400V

light source：                                UV LIGHT

tube specification  / quantity：   15W / 3

exposure time：                            0 ~ 10 min

vacuum degree：                         ≤－0.7bar

Max exposure area：                   400×200 mm（thickness0.3 ~ 10 mm）

power：                                         220 ~ 240V  50 / 60Hz  130W

machine dimension：                  520×415×140 mm

machine weight：

The company keep the right for updating products structure and parameter, any revise will not notify, The catalog description is only used for reference and parameters to the actual item or an agreement between the two sides to the right